No Slide Title - SiPS - Inesc-ID

Transcrição

technology
from seed
MagCMOS - Magnetic CMOS Chips
Tiago Costa, Moisés S. Piedade (INESC-ID)
Filipe A. Cardoso, Paulo P. Freitas (INESC-MN)
Instituto de Engenharia de Sistemas e Computadores Investigação e Desenvolvimento em Lisboa
1
CMOS ET Whistler 17-19 July 2013
11-02-2015
Motivation
technology
from seed
• Magnetoresistive (MR) -based biochips for biomolecular recognition[1]
– Biomolecular probes are immobilized in MR sensor chip surface
– Magnetic bead is attached to target biomolecule
– If target and probe biomolecules are complementary, hybridization occurs
– After washing to remove unhybridized biomoleclues, the magnetic bead is
magnetized by na external field, and generate fringe fields that are detected by the
MR sensors
– Femtomolar detection [8]
2
11-02-2015
Motivation
technology
from seed
• Magnetoresistive Sensors for neuronal reading [2]
– To measure neuronal signals produced by action potential
currents created by activation of multiple pyramidal cell bodies
3
11-02-2015
Motivation
technology
from seed
• MR sensor based Non-destructive testing (NDT) using
eddy currents [3]
a)
Gold contact
PCB
Wirebondin
g
MTJ Chip
Al contact
MTJ sensor
Excitation
line
200 µm
100 µm
140 µm
4
11-02-2015
Motivation
technology
from seed
• Non-destructive testing (NDT) using eddy currents
50
Lockin
Vfield
V (Vrms)
Vb
40
30
20
10
0
-20 -15 -10 -5
Rp
Sensors
Field generators
0
5
10
15
20
X (mm)
Mock-up
5
11-02-2015
Motivation
technology
from seed
• Sensor Front-end Implementations are off-chip
Control
Board
Biomolecular recognition
Variable gain
amplifier + Filters
Current
source+Preamplifier
Neuronal magnetic reading
NDT
- Cabling interconnections
- Power consumption
- Costs
6
11-02-2015
Outline
technology
from seed
• MagCMOS - Magnetic CMOS Chips
• CMOS Circuits + Magnetoresistive Sensors
• Magnetoresistive (MR) Sensors
• Spin Valves and Magnetic Tunnel Junctions
• CMOS Circuits for MR sensors reading and driving
• Main Challenges and Proposed Solutions
• Integration of MR sensors
• Envisaged research applications
• Biochips
• Neuronal implants
7
11-02-2015
MagCMOS - Magnetic CMOS Chips
technology
from seed
• MagCMOS
• Thin film MR Sensors
• CMOS circuit as substrate
• MagCMOS: A practical example
•
•
•
•
b) Analog Circuit including Driving
And reading of MR sensors
a) 1 – Microphoto of CMOS chip
a) 2 – Closed view of MR sensors
8
[4]
11-02-2015
Magnetoresistive (MR) Sensors
technology
from seed
• Spin Valves (SV) [5]
–
–
–
•
Electrical resistance depends on the alignment of the electron spin of two ferromagnetic
layers
MR~ 7 %
Fabricated by INESC-MN.
𝑀𝑅𝑟𝑎𝑡𝑖𝑜 =
𝑅𝐻 −𝑅𝐿
𝑅𝐿
%
9
11-02-2015
Magnetoresistive (MR) Sensors
technology
from seed
• Magnetic Tunnel Junctions (MTJ) [5]
–
–
–
•
MTJ effect is based on the spin-dependent tunneling effect, where electrons pass
through an insulating barrier between two ferromagnetic electrodes
MR up to 200 %
Fabricated by INESC-MN
𝑀𝑅𝑟𝑎𝑡𝑖𝑜 =
𝑅𝐻 −𝑅𝐿
𝑅𝐿
%
10
11-02-2015
CMOS Circuits for MR sensors reading
and driving
technology
from seed
• To develop a CMOS instrumentation circuit for MR biosensors
interface
• CMOS circuit requirements:
– Current source to bias the MR sensors.
– Allow the addressing of a wide number of MR sensors (hundreds to thousands).
– Pre-amplify, filter, and digitize MR sensor signals
– Minimum noise in order to take advantage of high sensitivity of MR sensors.
– Minimum power consumption and area in order to increase battery lifetime and
decrease system cost.
11
11-02-2015
and driving
technology
from seed
Bandgap
core
MB
dvbg
2
Io
di mb
RS Vo
2
KF
df
dio2 = 4KT g mB  g 2mb
2
3
WB LBCOX
f
2
Voltage noise density V/sqrt(Hz)
• DC Current Source
2
x 10
-6
dV ,W*L=2000 m
2
O
1.5
dV ,W*L=20 m2
1
O
dVR
S
0.5
0 -1
10
10
0
10
1
2
10
10
Frequency (Hz)
3
10
4
10
5
2
dvo2 = dio2  R S2  dvRS
12
11-02-2015
and driving
technology
from seed
• New DC current source using chopper modulation [6]
k
1
dvamp
Bandgap
Core
dim2
2
2
M2 M3
VREF
dvbg
2
dvm1
2
R
M1
dVRS
Io
RS
dir
2
RREF
di 
2
o
2
dvamp
2
RREF
 dir2ref
dim3
2
2
Vo
dirref
2
2
dvo2 = dio2  R S2  dvRS
13
11-02-2015
and driving
technology
from seed
• MR Sensor Addressing [7]
vMEAS
IS
SWr1
SWrm
VE
SWcn
SWcn
RS11
RS1n
RSm1
RSmn
V1
+
V2
AV
VS
SWci IS
RSij
VDD
VDD
M1c1
RSW
V
V  V2 VE
 SW  1

IS
IS
IS
1
SELc1
SWc1
SELc1
M1cn
SELcn
M2c1
SWcn
SELcn
+
M2cn
M3c1
M3cn
14
11-02-2015
technology
Envisaged Research Applications
from seed
• DC+AC Current Biasing
– DC+AC Current for MR Sensors biasing, plus pre-amplification
– 32 MR sensors in 4 blocks of 8 sensors
– 3rd order band-pass filter to remove unwanted frequency components
Electric signal components
f3
f4
Signal w/ magnetic component
(information)
15
11-02-2015
technology
from seed
• DC+AC Current Biasing
VDD
+Amp+Filter
Filter
Current
Generator
-
+
IF
V_Cancel
MUX
-
(linearized
switches)
GMR1_1
GND
GMR1_8
MR
(Magneto
Resistors)
VCOM1
External
Resistor (PCB)
GND
16
11-02-2015
technology
from seed
and driving
• MR Sensor integration over CMOS chip
17
11-02-2015
technology
from seed
and driving
• MR Sensor integration over
CMOS chip in our lab [4]
1.
2.
3.
4.
5.
6.
Glue CMOS chip on hole etched
with its dimensions on a Si 1x1
inch2 piece
Make mask for MR sensor
deposition
Deposite MR sensor
Make mask for MR sensor
connection
Deposite metal interconnections
Deposit Oxide
18
11-02-2015
technology
from seed
and driving
• MR Sensor integration over CMOS chip [4]
19
11-02-2015
technology
from seed
• Biochips for Biomolecular recognition
CMOS chip + 14 MR Sensors [5]
CMOS chip + 256 MR Sensors
20
11-02-2015
technology
from seed
• Neuronal Magnetic Reading [6]
21
11-02-2015
technology
from seed
• MR sensor based non-destructive testing (NDT) using
eddy currents
22
11-02-2015
technology
from seed
• MR sensor based non-destructive testing (NDT) using
eddy currents
– Filter simulated results
23
11-02-2015
technology
from seed
– Filter simulated results
24
11-02-2015
technology
from seed
– Amplifier experimental results
25
11-02-2015
technology
Conclusions
from seed
• MR Sensor fabrication over CMOS chips have been
proven
• CMOS circuits for MR sensor biasing, addressing, and
signal amplification and filtering have been designed
• Ultra-low noise instrumentation amplifier and analog-todigital converter must be designed in order to provide a
full on-chip frontend for the on-chip MR sensors.
26
11-02-2015
technology
References
from seed
[1] J. Germano, V. Martins, F. Cardoso, T. Almeida, L. Sousa, P. Freitas, and M. Piedade, “A portable and autonomous magnetic
detection platform for biosensing,” Sensors, vol. 9, no. 6, pp. 4119–4137, 2009.
[2] J. Amaral, V. Pinto, T. Costa, J. Gaspar, R. Ferreira, E. Paz, S. Cardoso, and P. Freitas, “Integration of tmr sensors in silicon
microneedles for magnetic measurements of neurons,” IEEE Transactions on Magnetics, 2013, in press.
[3] L. S. Rosado, T. G. Santos, M. Piedade, P. M. Ramos, and P. Vilaça, “Advanced technique for nondestructive testing of friction stir
welding of metals,” Measurement, vol. 43, no. 8, pp. 1021 – 1030, 2010.
[4] F. A. Cardoso, T. Costa, J. Germano, J. Borme, J. Gaspar, J. R. Fernandes, M. S. Piedade, and P. P. Freitas, “Integration of
magnetoresistive biochips on a cmos circuit,” IEEE Transactions on Magnetics, vol. 48, no. 11, 2012.
[5] P. P. Freitas, R. Ferreira, S. Cardoso, and F. Cardoso, “Magnetoresistive sensors,” J. of Physics: Condensed Matter, vol. 19, no. 16,
2007.
[6] T. Costa, M. Piedade, and M. Santos, “An ultra-low noise current source for magnetoresistive biosensors biasing,” in Biomedical
Circuits and Systems Conference (BioCAS), 2012 IEEE, 2012, pp. 73–76.
[7] T. Costa, M. S. Piedade, and J. R. Fernandes, “A cmos circuit for precise reading of matrix addressed magnetoresistive biosensors,” in
Proc. IEEE Biomedical Circuits and Systems Conf. (BioCAS), 2011, pp. 389–392.
[8] Verónica Martins, Filipa Cardoso, José Germano, Susana Cardoso, Leonel Sousa, Moises Simões Piedade, Paulo Freitas and Luís
Fonseca. Femtomolar Limit of Detection with a Magnetoresistive Biochip, Biosensors and Bioelectronics, Elsevier, January 2009.
27
11-02-2015
technology
Acknowledgements
–
–
–
–
from seed
FCT Project PTDC/EEA-ELC/108555/2008 (biomagcmosplat)
FCT Project PTDC/EEI-PRO/3219/2012 (INSPECT)
FCT Project PEST-OE/EEI/LA0021/2011
European project FP7-ICT-2011-7(IMAGIC-GA288381).
28
11-02-2015
technology
from seed
Thank you

No Slide Title - SiPS - Inesc-ID

Transcrição

Documentos relacionados

SKI em WHISTLE SKI em WHISTLER 2017 17

Curriculum Vitae

Riviera Maia - Grand Sirenis Mayan Beach.pub

Prof. Dr. Abdulhusein Hasanali Paliwala

Ladan Eftekhari "Hâfez e Szymanowski: Les chants d`amour" Ana

circuitos e sistemas electrónicos

FORMAÇÃO ACADÉMICA Graus DBA, Finance, Kent State

promoção estudo + viagens

Programa - Naturlink

Circuitos Integrados (CIs)

CMOS: Preparados para o Broadcast de hoje