碳纳米管异质结构的 ECR

h 21 p h 5 C
2006 7 9 4G+\
Vol. 21, No. 5
Journal of Inorganic Materials
Sep., 2006
juCQ: 1000-324X(2006)05-1244-05
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Fig. 1 (a) Typical SEM image and (b) magnification SEM image of nanotube junctions
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Fig. 2 (a) TEM image and (b) magnification TEM image of nanotube junctions
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Synthesis of Carbon Nanotube Junction by ECR-CVD
WANG Zhi1,2 , BA De-Chun3 , YU Chun-Hong2 , LIANG Ji1
(1. Department of Mechanical Engineering, Tsinghua University, Beijing 100084, China; 2. Shenyang
Institute of Aeronautical Engineering, Shenyang 110034, China; 3. School of Mechanical Engineering and
Automation, Northeastern University, Shenyang, 110004, China)
Abstract: A new type of nanotube junction was synthesized with CH4 /H2 and CH4 /B2 H6 /H2
source gases in a continuous CVD process by electron cyclotron resonance chemical vapor deposition (ECR-CVD), Fe3 O4 nanoparticle as the catalyst and porous silicon as the substrate. Scanning
electron microscope (SEM) and transmission electron microscope (TEM) were used to evaluate the
morphology and structure. The result shows that the junction is joined with a bamboo-like borondoped CNT at one side and a straight tubular CNT at another side. The junction grows via
bottom-end growth mechanism, boron-doped CNT growing in first period is on the top of the
nanotube junction.
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Key words ECR-CVD; junction; carbon nanotube; boron-doped