MI300FTL - Info sheet - SPA Software Entwicklungs GmbH

MI300FTL - Info sheet - SPA Software Entwicklungs GmbH

Microscope module SmartWLI
Magnifications:
2.5x (2D)
10x (2D)
2D Resolution:
3.94 µm/px 0.99 µm/px
50x (3D)
0.54 µm/px
(Other microscope modules and magnifications on request)
3D Measurement:
3D range:
400 µm
3D resolution (Z):
1.0 nm
Wafer size: 8” Frame + 12”
Frame
Full SECS-GEM compatible
Standalone usable
Customer specified data
management
Wafermap-handling and Host
connectivity
Automatic Optical Inspection
and Manual Optical
Inspection (AOI, MOI)
Microscope + 3D Inspection
Through light inspection
(optional)
Motorized high precision XY
table
Frame fixation with vacuum
Manual Frame Handling
Barcode label reader
Vibration decoupling
Clean room specified
SPA Software Entwicklungs GmbH
Seifartshofstrasse 12-14
96450 Coburg
Tel: +49 9561 7947-0
Fax: +49 9561 7947-77
Email: [email protected]